JPS6236528U - - Google Patents
Info
- Publication number
- JPS6236528U JPS6236528U JP12757485U JP12757485U JPS6236528U JP S6236528 U JPS6236528 U JP S6236528U JP 12757485 U JP12757485 U JP 12757485U JP 12757485 U JP12757485 U JP 12757485U JP S6236528 U JPS6236528 U JP S6236528U
- Authority
- JP
- Japan
- Prior art keywords
- hole
- transfer
- communicating
- movable body
- filling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000007791 liquid phase Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12757485U JPS6236528U (en]) | 1985-08-20 | 1985-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12757485U JPS6236528U (en]) | 1985-08-20 | 1985-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6236528U true JPS6236528U (en]) | 1987-03-04 |
Family
ID=31022455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12757485U Pending JPS6236528U (en]) | 1985-08-20 | 1985-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236528U (en]) |
-
1985
- 1985-08-20 JP JP12757485U patent/JPS6236528U/ja active Pending